High quality AlN growth by ammonia-free high-temperature MOVPE
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- Shen Xu-Qiang
- AIST
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- Kojima Kazutoshi
- AIST
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- Okumura Hajime
- AIST
Bibliographic Information
- Other Title
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- アンモニアフリー高温有機金属気相成長法における高品質AlN成長
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2019.2 (0), 3466-3466, 2019-09-04
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390292815277174144
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC