Fabrication of HfZrO<sub>2</sub> thin film from mixed precursor using MOCVD ... ... ...
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- Nakano Genta
- Sci. Tokyo Univ. of Sci.
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- Nakajima Takashi
- Sci. Tokyo Univ. of Sci. JST PRESTO
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- Hashizume Yoichiro
- Sci. Tokyo Univ. of Sci.
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- Okamura Soichiro
- Sci. Tokyo Univ. of Sci.
Bibliographic Information
- Other Title
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- 混合前駆体原料を用いたMOCVD法によるHfZrO<sub>2</sub>極薄膜の作製 ... ...
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2018.2 (0), 1331-1331, 2018-09-05
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390293434337253760
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC