Second-Phase Evaluation of Minority Carrier Lifetime in FZ-Si Affected by Si-IGBT Process
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- Kobayashi Hiroto
- Meiji Univ.
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- Yokogawa Ryo
- Meiji Univ. JSPS Research Fellow DC
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- Kinoshita Kosuke
- Meiji Univ.
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- Numazawa Yoichiro
- Meiji Univ.
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- Ogura Atsushi
- Meiji Univ.
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- Nishizawa Shin-ichi
- Kyushu Univ.
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- Saraya Takuya
- Tokyo Univ.
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- Ito Kazuo
- Tokyo Univ.
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- Takakura Toshihiko
- Tokyo Univ.
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- Suzuki Shinichi
- Tokyo Univ.
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- Fukui Munetoshi
- Tokyo Univ.
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- Takeuchi Kiyoshi
- Tokyo Univ.
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- Hiramoto Toshiro
- Tokyo Univ.
Bibliographic Information
- Other Title
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- Si-IGBTプロセスによるFZ-Siの少数キャリアライフタイムへの影響評価-II-
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2018.2 (0), 2888-2888, 2018-09-05
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390293434338337536
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC