Design of Deep UV Second Harmonic Generation Device with ZrO<sub>2</sub>/AlN Multilayer Waveguide
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- Yamaguchi Shuhei
- Grad. School of Eng., Osaka Univ.
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- Uemukai Masahiro
- Grad. School of Eng., Osaka Univ.
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- Takahashi Kazuya
- Fac. Sci. & Tech., Meijo Univ.
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- Iwaya Motoaki
- Fac. Sci. & Tech., Meijo Univ.
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- Akasaki Isamu
- Fac. Sci. & Tech., Meijo Univ.
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- Hayashi Yusuke
- Mie Univ.
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- Miyake Hideto
- Mie Univ.
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- Yamada Tomoya
- Grad. School of Eng., Osaka Univ.
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- Fujiwara Yasufumi
- Grad. School of Eng., Osaka Univ.
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- Katayama Ryuji
- Grad. School of Eng., Osaka Univ.
Bibliographic Information
- Other Title
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- ZrO<sub>2</sub> /AlN積層導波路を用いた深紫外第二高調波発生デバイスの設計
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2018.1 (0), 3522-3522, 2018-03-05
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390293655509304448
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC