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Development of Equipment for Step-and-Repeat Projection Exposure For IC Fabrication and its Diffusion
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- HIROTA Yoshito
- Osaka University
Bibliographic Information
- Other Title
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- 半導体露光装置ステッパーの開発，普及とその要因
- ハンドウタイ ロコウ ソウチ ステッパー ノ カイハツ フキュウ ト ソノ ヨウイン
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Journal
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- Journal of the Japan Society for the History of Industrial Technology
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Journal of the Japan Society for the History of Industrial Technology 12 (2), 27-52, 2001-08-25
The Japan Society for the History of Industrial Technology
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Details 詳細情報について
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- CRID
- 1390294562484102784
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- NII Article ID
- 10009934563
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- NII Book ID
- AN10018746
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- ISSN
- 27582248
- 09113525
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- NDL BIB ID
- 6182761
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL Search
- CiNii Articles