Substrate Temperature Dependence of C-N Thin Firm Deposited by Ionic Liquid Ion Beam
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- Hoshide Yuki
- Kyoto Univ
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- Takeuchi Mitsuaki
- Kyoto Univ
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- Hiromichi Ryuto
- Kyoto Univ
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- Takaoka Gikan
- Kyoto Univ
Bibliographic Information
- Other Title
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- イオン液体イオンビームにより形成したC-N薄膜の基板温度依存性
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2015.2 (0), 1544-1544, 2015-08-31
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390295823371492480
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC