Fabrication of Si quantum dots using Neutral Beam Etching and its Thermal characteristics
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- KIKUCHI AKIOU
- GSE, Tohoku Univ. Central Glass .co .ltd.
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- YAO AKIFUMI
- Central Glass .co .ltd.
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- MORI ISAMU
- Central Glass .co .ltd.
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- NAKAMURA MASAKAZU
- NAIST
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- YAMASHITA ICHIRO
- NAIST
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- SAWANO KENTARO
- Tokyo City Univ.
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- SAMUKAWA SEIJI
- IFS, Tohoku Univ
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- ONO TAKAHITO
- GSE, Tohoku Univ.
Bibliographic Information
- Other Title
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- 中性粒子ビームエッチング技術を用いたSi量子ドットの作製と熱伝導特性
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2015.2 (0), 1783-1783, 2015-08-31
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390295823371759872
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC