Fabrication of high-quality AlN buffer layer for deep-UV LEDs grown on wet chemical etched patterned sapphire substrate
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- Kanazawa Yuuya
- RIKEN Saimata Univ.
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- Toyoda Shiro
- RIKEN Saimata Univ.
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- Ohsima Issei
- RIKEN Saimata Univ.
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- Kamata Norihiko
- Saimata Univ.
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- Kashima Yukio
- MARUBUN
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- Matsuura Eriko
- MARUBUN
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- Shimatani Satoshi
- TOKYO OHKA KOGYO
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- Kokubo Mitsunori
- TOSHIBA MACHINE
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- Tashiro Takaharu
- TOSHIBA MACHINE
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- Ohkawa Takafumi
- TOSHIBA MACHINE
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- Kaminura Ryuichiro
- ULVAC
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- Osada Yamato
- ULVAC
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- Hirayama Hideki
- RIKEN
Bibliographic Information
- Other Title
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- ウェットエッチングによるサファイア表面加工基板(PSS)を用いた深紫外LED用高品質AlNテンプレートの作製
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2015.1 (0), 3337-3337, 2015-02-26
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390296066524828288
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC
