Fabrication and evaluation of B-ion-implanted BaSi<sub>2</sub> films by prepared sputtering
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- Sato Takumi
- Tsukuba Univ.
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- Takenaka Haruki
- Tsukuba Univ.
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- Du Rui
- Tsukuba Univ.
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- Mesuda Masami
- Tosoh Corporation.
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- Toko Kaoru
- Tsukuba Univ.
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- Suemasu Takashi
- Tsukuba Univ.
Bibliographic Information
- Other Title
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- スパッタ法によるB-ion-implanted BaSi<sub>2</sub>膜の作製と評価
Journal
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- Proceedings of the Annual Meeting of the Japan Photovoltaic Society
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Proceedings of the Annual Meeting of the Japan Photovoltaic Society 3 (0), 85-85, 2023-06-23
The Japan Photovoltaic Society
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Details 詳細情報について
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- CRID
- 1390297205563321728
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- ISSN
- 24366498
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- Text Lang
- ja
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- Data Source
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- JaLC
