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- SEKIGUCHI Shinichi
- Ebara Corporation
Bibliographic Information
- Other Title
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- 特集「ドライ真空ポンプの最新動向」企画趣旨
Description
<p>This special feature focuses on the latest trends in the dry vacuum pump industry. One comprehensive report along with 5 technical introductions will enhance the knowledge of users and manufactures of the dry vacuum pumps.</p>
Journal
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- Vacuum and Surface Science
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Vacuum and Surface Science 67 (4), 154-155, 2024-04-10
The Japan Society of Vacuum and Surface Science
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Keywords
Details 詳細情報について
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- CRID
- 1390299760188979328
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- ISSN
- 24335843
- 24335835
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- Text Lang
- ja
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- Data Source
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- JaLC
- Crossref
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- Abstract License Flag
- Disallowed