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Effect of Noble Gas on a-C:H Film Deposition by Tailored Voltage Waveform-PECVD
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- Nagamatsu Daiki
- Kyushu Univ.
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- Arima Toshiaki
- Kyushu Univ.
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- Otaka Michihiro
- Kyushu Univ.
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- Yamashita Daisuke
- Kyushu Univ.
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- Kamataki Kunihiro
- Kyushu Univ.
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- Koga Kazunori
- Kyushu Univ.
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- Shiratani Masaharu
- Kyushu Univ.
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- Otomo Hiroshi
- Tokyo Electron Technology Solutions Limited
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- Shindo Takahiro
- Tokyo Electron Technology Solutions Limited
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- Tanaka Satoshi
- Tokyo Electron Technology Solutions Limited
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- Matsudo Tatsuo
- Tokyo Electron Technology Solutions Limited
Bibliographic Information
- Other Title
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- 任意電圧波形励起PECVDによるa-C:H成膜における希ガスの効果の検証
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2022.1 (0), 1462-1462, 2022-02-25
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390303932787898752
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC