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Contact resistance improvement and modeling of stripe-recessed ohmic contact for InAlGaN/AlN/GaN HEMTs
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- Kumazaki Yusuke
- Fujitsu
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- Ozaki Shiro
- Fujitsu
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- Okamoto Naoya
- Fujitsu
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- Hara Naoki
- Fujitsu
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- Ohki Toshihiro
- Fujitsu
Bibliographic Information
- Other Title
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- ストライプリセスオーミックコンタクトによるInAlGaN/AlN/GaN HEMTのコンタクト抵抗改善とモデル検討
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2022.1 (0), 2415-2415, 2022-02-25
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390303932788693632
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC