Resonant-type MEMS Magnetic Sensor with FePd Magneto-strictive and PZT Piezo-electric Films
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- Okada Naoki
- Graduate school of Science and Engineering, Yamagata University
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- Suzuki Koudai
- Faculty of Engineering, Yamagata University
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- Mineta Takashi
- Graduate school of Science and Engineering, Yamagata University
Bibliographic Information
- Other Title
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- FePd磁歪膜とPZT圧電膜を搭載した共振型MEMS磁気センサ
Abstract
<p>This letter describes a resonant-type magnetic sensor with piezo-electric film elements on an Si micro-bridge resonator and other micro-bridge structures with magneto-strictive film to provide structural deformation by external magnetic flux. The sensor was successfully fabricated with thick sol-gel PZT film (1.1 µm) and Fe65Pd35 magneto-strictive film (2 µm) on Si (5 µm) micro-bridges. The resonant behavior was evaluated using the output voltage from the PZT film element on the bridge resonator. The resonant frequency decreased with increasing applied magnetic flux because initial strain of the micro-bridge with the tensile stress of PZT film was relaxed by the magneto-striction.</p>
Journal
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- IEEJ Transactions on Sensors and Micromachines
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IEEJ Transactions on Sensors and Micromachines 139 (11), 383-384, 2019-11-01
The Institute of Electrical Engineers of Japan
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Details
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- CRID
- 1390564227333930112
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- NII Article ID
- 130007740428
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- ISSN
- 13475525
- 13418939
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- Text Lang
- ja
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- Data Source
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- JaLC
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed