FePd磁歪膜とPZT圧電膜を搭載した共振型MEMS磁気センサ

岡田 尚樹, 鈴木 広大, 峯田 貴

doi:10.1541/ieejsmas.139.383

書誌事項

タイトル別名

Resonant-type MEMS Magnetic Sensor with FePd Magneto-strictive and PZT Piezo-electric Films

説明

<p>This letter describes a resonant-type magnetic sensor with piezo-electric film elements on an Si micro-bridge resonator and other micro-bridge structures with magneto-strictive film to provide structural deformation by external magnetic flux. The sensor was successfully fabricated with thick sol-gel PZT film (1.1 µm) and Fe₆₅Pd₃₅ magneto-strictive film (2 µm) on Si (5 µm) micro-bridges. The resonant behavior was evaluated using the output voltage from the PZT film element on the bridge resonator. The resonant frequency decreased with increasing applied magnetic flux because initial strain of the micro-bridge with the tensile stress of PZT film was relaxed by the magneto-striction.</p>

収録刊行物

電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）

電気学会論文誌Ｅ（センサ・マイクロマシン部門誌） 139 (11), 383-384, 2019-11-01

一般社団法人電気学会

キーワード

詳細情報詳細情報について

CRID: 1390564227333930112

NII論文ID: 130007740428

DOI: 10.1541/ieejsmas.139.383

ISSN: 13475525; 13418939

Web Site: https://www.jstage.jst.go.jp/article/ieejsmas/139/11/139_383/_pdf

本文言語コード: ja

データソース種別

JaLC
Crossref
CiNii Articles
OpenAIRE

抄録ライセンスフラグ: 使用不可

書き出し

問題の指摘