書誌事項
- タイトル別名
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- Resonant-type MEMS Magnetic Sensor with FePd Magneto-strictive and PZT Piezo-electric Films
抄録
<p>This letter describes a resonant-type magnetic sensor with piezo-electric film elements on an Si micro-bridge resonator and other micro-bridge structures with magneto-strictive film to provide structural deformation by external magnetic flux. The sensor was successfully fabricated with thick sol-gel PZT film (1.1 µm) and Fe65Pd35 magneto-strictive film (2 µm) on Si (5 µm) micro-bridges. The resonant behavior was evaluated using the output voltage from the PZT film element on the bridge resonator. The resonant frequency decreased with increasing applied magnetic flux because initial strain of the micro-bridge with the tensile stress of PZT film was relaxed by the magneto-striction.</p>
収録刊行物
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- 電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）
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電気学会論文誌Ｅ（センサ・マイクロマシン部門誌） 139 (11), 383-384, 2019-11-01
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390564227333930112
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- NII論文ID
- 130007740428
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- ISSN
- 13475525
- 13418939
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
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- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可