FCVA法によるホウ素含有炭素ターゲットを用いたta-C:B膜の成膜および300℃までのトライボロジー特性

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タイトル別名
  • Deposition of ta-C:B Coating by FCVA Using Boron Doped Target and Its Tribological Behaviors at Elevated Temperature up to 300℃
  • FCVAホウ ニ ヨル ホウソ ガンユウ タンソ ターゲット オ モチイタ ta-C:Bマク ノ セイマク オヨビ 300℃ マデ ノ トライボロジー トクセイ

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<p>Boron doped tetrahedral amorphous carbon (ta-C:B) coatings were deposited with Filtered Cathodic Vacuum Arc (FCVA) method using boron doped graphite target (B=0, 5 and 10 at. %). The material properties and tribological properties of ta-C:B coatings were obtained at 23~300℃. The amount of boron contents in ta-C:B coatings are from 0 to 5.1 at. %, and the hardness of coatings ware more than 30 GPa. The friction coefficient of ta-C:B3.1 at 300℃ is about 0.02 in air. The specific wear rate of ta-C:B coating were lower than normal ta-C coating by 34% and 46% for ta-C:B3.1 and ta-C:B5.1, respectively. The sp2/(sp2+ sp3) ratio measured by XPS and O/C ratio measured by AES increased through the friction at 300℃ for ta-C, on the other hand both values did not change for ta-C:B. Friction coefficients of ta-C:B3.1 were shown as 0.055 at 23℃ and about 0.02 at 100~300℃. The specific wear rate of ta-C:B3.1 at 23~300℃ in air was about 2.0 × 10−6 mm3/Nm. From these results, we confirmed that ta-C:B shows lower friction and higher specific wear resistance at 23~300℃ in air than ta-C.</p>

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  • トライボロジスト

    トライボロジスト 63 (10), 699-705, 2018-10-15

    一般社団法人 日本トライボロジー学会

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