逆リフトオフ法を用いたMEMSミラー構造体の作製

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タイトル別名
  • Fabrication of MEMS mirror using reverse lift-off process

説明

<p>MEMS mirror device is a device that reflects and scans a laser by the torsion of the beam structure. By miniaturization of the device, the reduction of the deflection angle of the mirror becomes to be an issue. In this research, we fabricated a MEMS mirror structure using film metallic glass formed by sputtering as a new material for the beam structure. In order to avoid the deterioration of the cross-sectional shape of the structure caused by the film thickening, a reverse lift-off method was used in the fabrication process. It is the method that forms film on a desired pattern and remove the others to obtain the flat and uniform thickness structure. Several conditions of the anneal was tested and the structure annealed at 200 ℃ shows less deflection than others. The fabricated structure was driven by external excitation, and it was confirmed that the resonance frequency was almost as designed.</p>

収録刊行物

  • 年次大会

    年次大会 2019 (0), J22208P-, 2019

    一般社団法人 日本機械学会

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