平面磁気研磨法の平面品質を改善に関する研究

DOI

書誌事項

タイトル別名
  • Study on Improving Surface Quality of Plan Magnetic Abrasive Finishing

抄録

<p>Magnetic abrasive finishing (MAF) is a precision surface polishing method, and it has been widely used in semiconductors, optics, aerospace industry, etc. At present, most studies on planar MAF are focused on improving the surface roughness accuracy. In practical applications, the initial surface of the workpiece is both rough and convex or concave. While the traditional processing method improves the surface roughness accuracy, the original surface is hardly unchanged. This paper proposes a finishing method of variable speed in different regions based on the initial surface of workpiece. According to the characteristics of the magnetic brush is distributed on the edge of the magnetic pole, it is regarded as composed of two left and right half circles. During the processing, the left and right parts will process twice at the same position of the workpiece. The finishing method in this paper makes the total processing time longer where the initial surface is high, while the total processing time is shorter where the initial surface is low, thereby achieving the purpose of improving the surface smoothness. This paper also verified the feasibility and effectiveness of this method through simulation and experiment.</p>

収録刊行物

キーワード

詳細情報 詳細情報について

  • CRID
    1390568617217299328
  • NII論文ID
    130007988815
  • DOI
    10.11522/pscjspe.2020a.0_170
  • 本文言語コード
    en
  • データソース種別
    • JaLC
    • CiNii Articles
  • 抄録ライセンスフラグ
    使用不可

問題の指摘

ページトップへ