Effects of Adsorbed Species on Shape Change in Ultrafine Cu Plating and Etching

DOI Web Site Web Site 2 References

Bibliographic Information

Other Title
  • 微細銅めっきとエッチングにおける形状変化と吸着物質の影響
  • ビサイ ドウメッキ ト エッチング ニ オケル ケイジョウ ヘンカ ト キュウチャク ブッシツ ノ エイキョウ

Search this article

Abstract

<p>Shape changes of ultrafine metallic structures were observed in Cu-plating and etching processes under the influence of adsorbed species acting as inhibitors and accelerators. The curvature enhanced accelerator coverage mechanism is important to explain Cu plating of narrow and deep trenches in the Damascene process. Effects of inhibitors on shape changes in Cu etching are discussed using the mechanism.</p>

Journal

  • Zairyo-to-Kankyo

    Zairyo-to-Kankyo 69 (9), 234-236, 2020-09-10

    Japan Society of Corrosion Engineering

References(2)*help

See more

Keywords

Details 詳細情報について

Report a problem

Back to top