Characteristic of outgassing for 0.2% Be-Cu
-
- Wada Kaoru
- TOKYO ELECTRONICS CO., LTD.
-
- Kamiya Junichiro
- JAPAN ATOMIC ENERGY AGENCY
-
- Kuramoti Katsuya
- TOTAL SUPPORT SYSTEMS CORPORATION
Bibliographic Information
- Other Title
-
- 0.2%Be-Cu材の放出ガス特性
Abstract
<p>0.2% Be-Cu material is used as an ultra-high vacuum gauge, a high-performance mass spectrometer, and an ultra-high vacuum material etc. Because, it has characteristics such as high thermal conductivity, low thermal radiation, and low outgassing. The outgassing of BeCu has been measured by the build-up method, and it is known that it is very small amount. Therefore, we measured the outgassing speed by a general baking method of the chamber made of stainless steel. And the characteristics of BeCu and SUS304 were compared.</p>
Journal
-
- Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science
-
Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science 2021 (0), 3P25-, 2021
The Japan Society of Vacuum and Surface Science
- Tweet
Details 詳細情報について
-
- CRID
- 1390571968054445824
-
- NII Article ID
- 130008134252
-
- ISSN
- 24348589
-
- Text Lang
- ja
-
- Data Source
-
- JaLC
- CiNii Articles
-
- Abstract License Flag
- Disallowed