Characteristic of outgassing for 0.2% Be-Cu

DOI

Bibliographic Information

Other Title
  • 0.2%Be-Cu材の放出ガス特性

Abstract

<p>0.2% Be-Cu material is used as an ultra-high vacuum gauge, a high-performance mass spectrometer, and an ultra-high vacuum material etc. Because, it has characteristics such as high thermal conductivity, low thermal radiation, and low outgassing. The outgassing of BeCu has been measured by the build-up method, and it is known that it is very small amount. Therefore, we measured the outgassing speed by a general baking method of the chamber made of stainless steel. And the characteristics of BeCu and SUS304 were compared.</p>

Journal

Details 詳細情報について

  • CRID
    1390571968054445824
  • NII Article ID
    130008134252
  • DOI
    10.14886/jvss.2021.0_3p25
  • ISSN
    24348589
  • Text Lang
    ja
  • Data Source
    • JaLC
    • CiNii Articles
  • Abstract License Flag
    Disallowed

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