書誌事項
- タイトル別名
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- Hetero Integration of Ferromagnetic NdFeB and Piezoelectric PZT for Vibratory MEMS Energy Harvesting Devices
抄録
<p>This paper addresses the hetero-integration of ferromagnetic NdFeB and piezoelectric PZT thin films for MEMS energy harvesting devices. Lamination structure of PZT and NdFeB is achieved by using barrier and passivation layer of SrRuO3/SiO2 thin films. The magnetic property of NdFeB is comparable to those of conventional one even after a high temperature deposition of PZT thin film. Ferroelectric hysteresis curve of PZT can be also observed. Individual pattering of PZT and NdFeB thin films in other place on a full wafer with a diameter of 100 mm is also examined for the future batch fabrication. For the batch fabrication test, the electrical and piezoelectric properties of the PZT/Si cantilever are comparable to those without NdFeB deposition process. A good magnetic property is also observed. These results demonstrate that the microfabrication process of NdFeB and PZT can be integrated at the level of batch fabrication.</p>
収録刊行物
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- 電気学会論文誌E(センサ・マイクロマシン部門誌)
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電気学会論文誌E(センサ・マイクロマシン部門誌) 142 (4), 56-62, 2022-04-01
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390573242795052672
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- ISSN
- 13475525
- 13418939
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- Crossref
- KAKEN
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- 抄録ライセンスフラグ
- 使用不可