Deposition of AlN thin film using minimal RF-sputtering machine
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- Hotta Masaya
- HORIBA STEC
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- Nishizato Hiroshi
- HORIBA STEC
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- Toonoe Haruki
- Yokogawa S. S.
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- Shiba Ikunari
- Yokogawa S. S.
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- Maeda Takuya
- N.I.T, Okinawa Coll.
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- Fujii Satoshi
- N.I.T, Okinawa Coll.
Bibliographic Information
- Other Title
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- ミニマルRFマグネトロンスパッタリング装置によるAlN薄膜の形成
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2020.2 (0), 1810-1810, 2020-08-26
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390573407640241024
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC