Radical nitridation of silicon by wavelength-selectively excited gold nanoparticle plasmons
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- Kitajima Takeshi
- Nat. Def. Acad.
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- Miyake Machiko
- Nat. Def. Acad.
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- Kuwata Shouma
- Nat. Def. Acad.
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- Nakano Toshiki
- Nat. Def. Acad.
Bibliographic Information
- Other Title
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- 波長選択励起金ナノ粒子プラズモンによるシリコンのラジカル窒化
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2020.2 (0), 1145-1145, 2020-08-26
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390573407661307392
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC