Pressure dependence of polycrystalline diamond film deposition using time-series exposure of modulated and non-modulated Ar/CH<sub>4</sub>/H<sub>2</sub> induction thermal plasmas.

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  • 変調-無変調Ar/CH<sub>4</sub>/H<sub>2</sub>誘導熱プラズマの時間直列照射法を用いた多結晶ダイヤモンド膜生成の圧力依存性

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