Pressure dependence of polycrystalline diamond film deposition using time-series exposure of modulated and non-modulated Ar/CH<sub>4</sub>/H<sub>2</sub> induction thermal plasmas.
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- Hata Kazufumi
- Kanazawa Univ.
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- Naoki Kano
- Kanazawa Univ.
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- Yusuke Nakano
- Kanazawa Univ.
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- Yasunori Tanaka
- Kanazawa Univ.
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- Yoshihiko Uesugi
- Kanazawa Univ.
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- Tatsuo Ishijima
- Kanazawa Univ.
Bibliographic Information
- Other Title
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- 変調-無変調Ar/CH<sub>4</sub>/H<sub>2</sub>誘導熱プラズマの時間直列照射法を用いた多結晶ダイヤモンド膜生成の圧力依存性
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2019.2 (0), 1842-1842, 2019-09-04
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390574290253503872
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC