Fabrication and Optimization of Zinc Oxide Thin Film Growth using Angle-Controlled Magnetron Sputtering
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- Hosaka Takumi
- Hosei Univ. NIMS
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- Yamagata Yoshihito
- Hosei Univ. NIMS
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- Ohsawa Takeo
- NIMS
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- Grachev Sergey
- Saint-Gobain Recherche
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- Montigaud Herve
- Saint-Gobain Recherche
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- Ishigaki Takamasa
- Hosei Univ.
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- Ohashi Naoki
- NIMS
Bibliographic Information
- Other Title
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- 角度制御型マグネトロンスパッタリング装置を用いた酸化亜鉛薄膜の作製と成膜条件の検討
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2018.2 (0), 3826-3826, 2018-09-05
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390574909315783680
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC