Stress distribution at SiO<sub>2</sub>/4H-SiC interface studied by Confocal Raman Microscopy
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- FU WEI
- Tsukuba Univ
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- Kobayashi Ai
- Tsukuba Univ
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- Yano Hiroshi
- Tsukuba Univ
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- Harada Shinsuke
- AIST
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- Sakurai Takeaki
- Tsukuba Univ
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2018.1 (0), 3666-3666, 2018-03-05
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390575130486100992
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- ISSN
- 24367613
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- Text Lang
- en
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- Data Source
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- JaLC