Complex and Deepening OPC (Optical Proximity effect Correction) : High Speed Writing Data Processing by GPGPU and Reduction of OPC Placements by Quadruple Pattern Technology
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- Kadota Kazuya
- Nano Science Lab
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- Koto Kokoro
- Nihon Synopsys G.K.
Bibliographic Information
- Other Title
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- 複雑化・深化するOPC(近接効果補正): GPUによる高速化処理とOPC配置数の削減
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2017.1 (0), 1657-1657, 2017-03-01
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390575661590512384
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC