Microwave Plasma Generation Using Cylindrical Cavity and Solid-State Amplifier Ⅱ
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- Hasegawa Yuichi
- Chubu Univ.
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- Ogawa Daisuke
- Chubu Univ.
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- Nakamura Keiji
- Chubu Univ.
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- Park Soonam
- Applied Materials
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- Kobayashi Satoru
- Applied Materials
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- Sugai Hideo
- NISRI
Bibliographic Information
- Other Title
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- 円筒キャビティと固体アンプを用いたマイクロ波プラズマ生成ⅠⅠ
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2016.1 (0), 1672-1672, 2016-03-03
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390576922110405632
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC