熱式質量流量センサの開発・生産プロセスに対する品質工学の適用

DOI

書誌事項

タイトル別名
  • Application of Quality Engineering to the Development of a Thermal Mass Flow Sensor and Its Production Process

抄録

Thermal mass flow controllers are used in the semiconductor manufacturing process. A thermal MFC has three main components: a thermal mass flow sensor, a laminar flow bypass, and a flow control valve. To obtain a flow rate and response characteristic of high accuracy and low variability, it is particularly necessary to improve the stability of the thermal mass flow sensor. In the development of a new thermal mass flow sensor, quality engineering techniques were applied to a series of processes: parameter design was applied during the development process, production parameter optimization was applied to reduce variability in the production process, and Mahalanobis-Taguchi methods were used to optimize zero stability inspection. Three results were obtained:（1） robust sensor characteristics relating mass flow to sensor output;（2）low-drift zero stability by optimization of production parameters; and（3）optimal inspection by MT methods, using quickly obtained data.

収録刊行物

  • 品質工学

    品質工学 30 (3), 27-36, 2022-07-01

    一般社団法人 品質工学会

キーワード

詳細情報 詳細情報について

  • CRID
    1390578603779546880
  • DOI
    10.18890/qes.30.3_27
  • ISSN
    21899320
    2189633X
  • 本文言語コード
    ja
  • データソース種別
    • JaLC
  • 抄録ライセンスフラグ
    使用不可

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