Application of Quality Engineering to the Development of a Thermal Mass Flow Sensor and Its Production Process

DOI

Bibliographic Information

Other Title
  • 熱式質量流量センサの開発・生産プロセスに対する品質工学の適用

Abstract

Thermal mass flow controllers are used in the semiconductor manufacturing process. A thermal MFC has three main components: a thermal mass flow sensor, a laminar flow bypass, and a flow control valve. To obtain a flow rate and response characteristic of high accuracy and low variability, it is particularly necessary to improve the stability of the thermal mass flow sensor. In the development of a new thermal mass flow sensor, quality engineering techniques were applied to a series of processes: parameter design was applied during the development process, production parameter optimization was applied to reduce variability in the production process, and Mahalanobis-Taguchi methods were used to optimize zero stability inspection. Three results were obtained:（1） robust sensor characteristics relating mass flow to sensor output;（2）low-drift zero stability by optimization of production parameters; and（3）optimal inspection by MT methods, using quickly obtained data.

Journal

Keywords

Details 詳細情報について

  • CRID
    1390578603779546880
  • DOI
    10.18890/qes.30.3_27
  • ISSN
    21899320
    2189633X
  • Text Lang
    ja
  • Data Source
    • JaLC
  • Abstract License Flag
    Disallowed

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