熱式質量流量センサの開発・生産プロセスに対する品質工学の適用
-
- 岡野 浩之
- (株)堀場エステック
書誌事項
- タイトル別名
-
- Application of Quality Engineering to the Development of a Thermal Mass Flow Sensor and Its Production Process
抄録
Thermal mass flow controllers are used in the semiconductor manufacturing process. A thermal MFC has three main components: a thermal mass flow sensor, a laminar flow bypass, and a flow control valve. To obtain a flow rate and response characteristic of high accuracy and low variability, it is particularly necessary to improve the stability of the thermal mass flow sensor. In the development of a new thermal mass flow sensor, quality engineering techniques were applied to a series of processes: parameter design was applied during the development process, production parameter optimization was applied to reduce variability in the production process, and Mahalanobis-Taguchi methods were used to optimize zero stability inspection. Three results were obtained:(1) robust sensor characteristics relating mass flow to sensor output;(2)low-drift zero stability by optimization of production parameters; and(3)optimal inspection by MT methods, using quickly obtained data.
収録刊行物
-
- 品質工学
-
品質工学 30 (3), 27-36, 2022-07-01
一般社団法人 品質工学会
- Tweet
キーワード
詳細情報 詳細情報について
-
- CRID
- 1390578603779546880
-
- ISSN
- 21899320
- 2189633X
-
- 本文言語コード
- ja
-
- データソース種別
-
- JaLC
-
- 抄録ライセンスフラグ
- 使用不可