Impacts of hydrogen annealing induced mobile ions on thermal SiO<sub>2</sub>/SiC interface property
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2013.1 (0), 3282-3282, 2013-03-11
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390578847125723392
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- ISSN
- 24367613
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- Text Lang
- en
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- Data Source
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- JaLC