書誌事項
- タイトル別名
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- Study of Humidity Sensor using α-Fe<sub>2</sub>O<sub>3</sub> as a Humidity-sensitive Material
抄録
<p>In this study, iron oxide thin films are prepared under various heat treatment conditions, and their crystal structures and moisture-sensitive characteristics were evaluated to clarify the usefulness of iron oxide thin films as humidity-sensitive materials for humidity sensors. In addition, the possibility of a humidity sensor with a wide dynamic range was investigated by evaluating the relationship between the film thickness of the iron oxide thin film, the electrode width of the device, and the humidity-sensitive characteristics. As a result, it was found that the crystal structure of α-Fe2O3 exhibits relatively good humidity sensitivity compared to other crystal structures, and that the sensitivity to humidity can be adjusted by appropriately selecting the electrode width and film thickness of the device. Therefore, the α-Fe2O3 thin film may be useful as a moisture-sensitive material for wide dynamic range humidity sensors by appropriately adjusting the film thickness and electrode width.</p>
収録刊行物
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- 電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）
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電気学会論文誌Ｅ（センサ・マイクロマシン部門誌） 143 (11), 351-356, 2023-11-01
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390579454814930176
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- ISSN
- 13475525
- 13418939
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- Crossref
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- 抄録ライセンスフラグ
- 使用不可