Revolution of sensors in micro electro mechanical systems (MEMS)

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  • ESASHI Masayoshi
    The World Premier International Research Center Advanced Institute for Materials Research, Tohoku University

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  • MEMSによるセンサの革新
  • MEMS ニ ヨル センサ ノ カクシン

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Abstract

<p>Microsensors in micro electro mechanical systems (MEMS) play important roles as input devices of the systems. Piezoresistive and capacitive pressure sensors, surface acoustic wave (SAW) wireless pressure sensors, tactile sensor networks for robots, accelerometers, angular rate sensors (gyroscopes), ranging image sensors using optical scanners, infrared imagers, component sensors for FTIR spectroscopy and gas chromatography, flow sensors, small-diameter fiber optic blood pressure sensors and implantable pressure sensors are described.</p>

Journal

  • Oyo Buturi

    Oyo Buturi 80 (3), 181-188, 2011-03-10

    The Japan Society of Applied Physics

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