1J5-2 ZnO/高密度電極/水晶構造高周波共振子型フィルタ(バルク波デバイス/弾性表面波デバイス)

DOI

書誌事項

タイトル別名
  • 1J5-2 High Frequency SAW Resonator Filter composed of ZnO/high-densityelectrode/quartz Structure(Bulk wave devices/Surface wave devices)

抄録

Radio frequency filters with a narrow band width.and high attenuations are required in recent years. One of the substrates with a suitable coupling factor and an excellent TCF for this filter is a ZnO film/Al electrode/quartz substrate. However, the reflection coefficient of this substrate has not reported, and both the RF SAW filter and the multiple mode resonator one using this substrate have not been reported. In this report, an RF narrow band SAW resonator filter composed of the ZnO/high density metal electrode/quartz structure was realized to obtain a suitable reflection coefficient, and it has minimum insertion loss of 2.08 dB, bandwidths of 3.9MHz (0.054%), and excellent TCF of 4.0ppm/℃.

収録刊行物

詳細情報 詳細情報について

  • CRID
    1390845713021124864
  • NII論文ID
    110007459362
  • DOI
    10.24492/use.29.0_171
  • ISSN
    24331910
    13488236
  • 本文言語コード
    ja
  • データソース種別
    • JaLC
    • CiNii Articles
  • 抄録ライセンスフラグ
    使用不可

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