Design of XYθ stage driven by piezoelectric actuators with reverse pantograph structures by FEM analysis

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  • FEM解析による逆パンタグラフ構造を用いたXYθステージの設計

Abstract

<p>Recently, miniaturization of electronic chip parts used for electronic devices including smart phones and personal computers has been advanced. In our laboratory, we have been working on the development of XYθ mobile inchworm mechanism driven by piezoelectric actuators, which is compact, lightweight and capable of 3DoF precise and flexible positioning. This mobile mechanism moves wide positioning area, although conventional three-axial linear stages are limited their positioning area by their precise guides. In this research, we aim to design an integrated XYθ stage by the stiffness matrix method for initial design and FEM for detailed analysis. We magnify displacements of the piezoelectric actuators 30 times with the reverse pantograph structures organized by flexure hinges. We also analyze its natural frequency by eigenvalue analysis to estimate the maximum frequency of the inchworm locomotion.</p>

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