書誌事項
- タイトル別名
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- Mass Spectrometry Analysis of Outgases from a Vacuum Equipment
- シンクウ ソウチ ニ オケル ホウシュツ ガス ノ シツリョウ ブンセキ
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説明
<p>Industrial vacuum equipment requires a clean surface free from contamination, depending on the intended degree of vacuum from the handling of parts. A quadrupole mass spectrometer is widely used as a method for analyzing outgass in a vacuum vessel. However, in order to perform more quantitative quality control, it is necessary to measure the accurate mass of the gas component and specify the components. In this study, accurate mass measurement was performed on outgass from various vacuum equipment using GC-MS and TOFMS, and it was possible to measure the gas components that could not be measured by the conventional method. By using this equipment, it is expected to improve vacuum quality and product quality.</p>
収録刊行物
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- 表面と真空
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表面と真空 62 (5), 251-255, 2019-05-10
公益社団法人 日本表面真空学会
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詳細情報 詳細情報について
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- CRID
- 1390845713067959552
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- NII論文ID
- 130007644554
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- NII書誌ID
- AA12808657
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- ISSN
- 24335843
- 24335835
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- NDL書誌ID
- 029719137
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDLサーチ
- Crossref
- CiNii Articles
- OpenAIRE
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- 抄録ライセンスフラグ
- 使用不可
