書誌事項
- タイトル別名
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- A Device for Localized Measurement of Small Particles with Electrode-Integrated Small Pores
- キョクショテキ ナ ビショウリュウシ ケイソク オ メザシタ デンキョク シュウセキガタ ビショウコウ デバイス
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説明
<p>In this article, we propose a device with multiple small pores, which are locally integrated with individual electrodes. The application is particle measurement using Coulter's method, using the integrated local electrode on each pore. Coulter's particle counter can achieve high resolution measurement; however, the method had sensitivity and throughput tradeoff problem in reducing measurable particle size. The system can locally observe current around the pore and thereby parallel measurement becomes possible while keeping high sensitivity. The fabricated pore size were 400 nm, 1.0 µm, and 1.5 µm. Spontaneous water flow was achieved with 1.5 µm device, and current dip attributable to Coulter's principle was observed.</p>
収録刊行物
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- 電気学会論文誌E(センサ・マイクロマシン部門誌)
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電気学会論文誌E(センサ・マイクロマシン部門誌) 139 (8), 271-276, 2019-08-01
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390845713085715328
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- NII論文ID
- 130007686521
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- NII書誌ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL書誌ID
- 029924074
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- 本文言語コード
- ja
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- 資料種別
- journal article
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