共焦点色収差式レーザ変位計を用いた超精密加工機の機上計測システム

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  • On-machine measurement system of ultra-precision machine tool using confocal chromatic probe

説明

This paper reports a result of construction of an on-machine measurement system on the ultraprecision machine tool, using a confocal chromatic probe to measurement material surface and using a real-time position capturing method in which branched encoder signals are recorded in external data storage, to evaluate motion trajectories on the ultra-precision machine tool. In the on-machine measurement on the optical flat, the micro waviness has been observed, which is considered to be a cause of mid spatial frequency profile error. The repeatability of measurement is about 2 nm in the X-axis direction and 7.5 nm in the Z-axis direction.

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