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- KOUCHI Toshinori
- Okayama University
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- AOYAMA Tsubasa
- Okayama University
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- NAGATA Yasunori
- Okayama University
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- YANASE Shinichiro
- Okayama University
Bibliographic Information
- Other Title
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- 半導体洗浄装置内に発生する大規模渦構造の制御について
Journal
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- The Proceedings of Conference of Chugoku-Shikoku Branch
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The Proceedings of Conference of Chugoku-Shikoku Branch 2020.58 (0), 05b5-, 2020
The Japan Society of Mechanical Engineers
- Tweet
Details 詳細情報について
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- CRID
- 1390848647552693248
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- NII Article ID
- 130007908067
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- ISSN
- 24242764
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- Text Lang
- ja
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- Data Source
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- JaLC
- Crossref
- CiNii Articles
- OpenAIRE
