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Development of a Procedure for Precisely Calculating Substrate Bending Caused by Multilayer Coating Stress
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- SUGIURA Muneo
- Tokai Optical Co., Ltd.
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- TAMURA Koichi
- Tokai Optical Co., Ltd.
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- KOBIYAMA Mitsunobu
- Tecwave Co., Ltd.
Bibliographic Information
- Other Title
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- 膜応力による基板の反りの定量的計算について
- マク オウリョク ニ ヨル キバン ノ ソリ ノ テイリョウテキ ケイサン ニ ツイテ
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Journal
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- Journal of The Surface Finishing Society of Japan
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Journal of The Surface Finishing Society of Japan 71 (10), 601-606, 2020-10-01
The Surface Finishing Society of Japan
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Keywords
Details 詳細情報について
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- CRID
- 1390850490578800896
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- NII Article ID
- 130008013951
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- NII Book ID
- AN1005202X
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- ISSN
- 18843409
- 09151869
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- NDL BIB ID
- 030691021
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL Search
- Crossref
- CiNii Articles
