Introduction of Soft X-ray Emission Spectrometer and its Applications

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  • 軟X線発光分光器の開発と材料分析事例
  • ナンXセン ハッコウ ブンコウキ ノ カイハツ ト ザイリョウ ブンセキ ジレイ

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Abstract

<p>A unique Soft X-ray Emission Spectrometer (SXES) has been developed. This spectrometer can analyse the emission spectrum of the soft X-ray region, based on the electron transition near the valence band, which is sensitive to the chemical bonding state of the material. Also, this spectrometer can detect X-rays in the ultra-soft X-ray region from 50 eV to 2.3 keV with parallel signal detection by using varied line spacing (VLS) gratings.</p><p>In this paper, we will introduce some typical application examples of the analysis of high temperature corrosion of Ni based alloy surface and the polymer analysis.</p>

Journal

  • Vacuum and Surface Science

    Vacuum and Surface Science 64 (11), 510-514, 2021-11-10

    The Japan Society of Vacuum and Surface Science

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