Innovation of the Driving Method and thereby Improvement of Frictional Fine Positioning System

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  • 摩擦式微動機構の新しい駆動方式とそれによる性能向上
  • マサツ シキビドウ キコウ ノ アタラシイ クドウ ホウシキ ト ソレニ ヨル セイノウ コウジョウ

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Abstract

<p>As the driving method of the frictional fine positioning system based on slow expansion and quick restoration of piezoelectric actuator, we demonstrate it is reasonable to use, rather than a high-power high-voltage amplifier, the combination of a dc source or an amplifier with a driving capacity of high-voltage but small-current and a MOSFET discharging switch to the ground. We also demonstrate a waveform redressing circuit without need of dedicated power source, which is useful when the restoration takes too much time due to a driver with insufficient performance or due to the cable inductance between the driver and the actuator.</p>

Journal

  • SEISAN KENKYU

    SEISAN KENKYU 73 (5), 381-384, 2021-11-01

    Institute of Industrial Science The University of Tokyo

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