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Fabrication of nanocrystals of ferroelectric memory materials by improved sputtering
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- Nishida Takashi
- Faculty of Engineering, Fukuoka University
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- Matsuzawa Kyomi
- Faculty of Engineering, Fukuoka University
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- Ohga Naoya
- Faculty of Engineering, Fukuoka University
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- Ono Junnosuke
- Faculty of Engineering, Fukuoka University
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- Tanaka Hibiki
- Faculty of Engineering, Fukuoka University
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- Watanabe Chikara
- Faculty of Engineering, Fukuoka University
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- Inoue Mizuki
- Faculty of Engineering, Fukuoka University
Bibliographic Information
- Other Title
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- 改良型スパッタ法による強誘電体メモリ材料ナノ結晶の形成
Description
<p>In order to realize of ferroelectric memory, high quality nanocrystals of ferroelectric materials are required. In this study, growth of ferroelectric PbTiO3 nanocrystals was investigated with our improved sputtering method. The nanocrystals obtained on atomically flat surface of sapphire substrate had highly homogeneity and orientation, and were aligned linearly on step edge of the atomically surface. It was revealed that high crystalline quality ferroelectric nanocrystals were fabricated by the improved sputtering, and growth position of the nanocrystals can also be controlled.</p>
Journal
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- Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science
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Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science 2021 (0), 3Ba07-, 2021
The Japan Society of Vacuum and Surface Science
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Details 詳細情報について
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- CRID
- 1390853443032020480
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- NII Article ID
- 130008134212
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- ISSN
- 24348589
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- Text Lang
- ja
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- Data Source
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- JaLC
- CiNii Articles
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- Abstract License Flag
- Disallowed
