Realization of closed-loop epitaxial thin-film growth optimization of superconducting TiN via machine learning
-
- Ohkubo Isao
- NIMS
-
- Hou Zhufeng
- NIMS
-
- N. Lee Jiyeon
- ISSP, U. of Tokyo
-
- Aizawa Takashi
- NIMS
-
- Lippmaa Mikk
- ISSP, U. of Tokyo
-
- Chikyow Toyohiro
- NIMS
-
- Tsuda Koji
- U. of Tokyo
-
- Mori Takao
- NIMS
Bibliographic Information
- Other Title
-
- 機械学習を活用したclosed-loop optimizationによるエピタキシャルTiN薄膜成長と超伝導特性
Journal
-
- JSAP Annual Meetings Extended Abstracts
-
JSAP Annual Meetings Extended Abstracts 2021.1 (0), 1341-1341, 2021-02-26
The Japan Society of Applied Physics
- Tweet
Details 詳細情報について
-
- CRID
- 1390855422518747264
-
- ISSN
- 24367613
-
- Text Lang
- ja
-
- Data Source
-
- JaLC