Development of a wide variety of half-inch wafers that can be used in Minimal Fab
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- Nemoto Kazumasa
- AIST
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- Tanaka Hiroyuki
- AIST
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- Sakai Takaaki
- Minimal Fab Fujikoshi
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- Kajikura Atsushi
- Minimal Fab Fujikoshi
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- Yang Zhen
- Minimal Fab VIYIA
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- Khumpuang Sommawan
- AIST Minimal Fab
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- Hara Shiro
- AIST Minimal Fab
Bibliographic Information
- Other Title
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- ミニマルファブでの利用を可能とする多種多様なハーフインチウェハの開発
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2021.1 (0), 2310-2310, 2021-02-26
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390855422518924672
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC