Development of sputtering epitaxial growth processes for AlGaN
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- Fujioka Hiroshi
- The Univ. of Tokyo JST-ACCEL
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- Sakurai Yuya
- The Univ. of Tokyo
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- Ueno Kohei
- The Univ. of Tokyo
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- Kobayashi Atsushi
- The Univ. of Tokyo
Bibliographic Information
- Other Title
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- AlGaN系窒化物スパッタエピプロセスの開発
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2018.2 (0), 265-265, 2018-09-05
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390856384291512064
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC