Density Profile Control of Microwave Plasma Generated by Cylindrical Cavity
-
- Hotta Masaya
- Chubu Univ.
-
- Hasegawa Yuichi
- Chubu Univ.
-
- Ogawa Daisuke
- Chubu Univ.
-
- Nakamura Keiji
- Chubu Univ.
-
- Park Soonam
- Applied Materials
-
- Lubomirsky Dima
- Applied Materials
-
- Kobayashi Satoru
- Applied Materials
-
- Sugai Hideo
- NISRI
Bibliographic Information
- Other Title
-
- 円筒キャビティによるマイクロ波プラズマ生成の密度分布制御
Journal
-
- JSAP Annual Meetings Extended Abstracts
-
JSAP Annual Meetings Extended Abstracts 2017.1 (0), 1710-1710, 2017-03-01
The Japan Society of Applied Physics
- Tweet
Keywords
Details 詳細情報について
-
- CRID
- 1390857136567331200
-
- ISSN
- 24367613
-
- Text Lang
- ja
-
- Data Source
-
- JaLC