Fabrication and evaluation of SiNP-SiGe<sub>0.3</sub> composite based on neutral beam etching technique
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- KIKUCHI AKIOU
- GSE, Tohoku Univ Central Glass
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- YAO AKIFUMI
- Central Glass
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- MORI ISAMU
- Central Glass
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- ONO TAKAHITO
- GSE, Tohoku Univ
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- SAMUKAWA SEIJI
- IFS, Tohoku Univ. AIMR, Tohoku Univ.
Bibliographic Information
- Other Title
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- 中性粒子ビームエッチング技術によるシリコンナノピラー-SiGe<sub>0.3</sub>複合膜の作製と熱伝導率の評価
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2016.2 (0), 1816-1816, 2016-09-01
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390858131657738368
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC