Life-time evaluation of UV-NIL transfers using line and space replica mold at low concentration release agent treatment

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  • 微細線構造レプリカモールドを用いた低濃度離型処理時のUV-NIL転写回数の寿命予測

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<p>When UV-NIL transfer is repeated in the mold, the mold release agent on the surface is deteriorated and then, resin adhesion or chipping occurs. Using a differential of water contact angle (CA) trend, life-time of release coating layer on mold is possible. Usually, concentration of release agent uses around 0.1 wt%, this value is low, but, lower concentration behavior is unknown. In this study, low concentration release properties were investigated using replica molds which had 100 nm L&S patterns. Even at concentrations lower than 0.1wt%, the lifetime of the number of imprints could also be predicted by the method using L&S mold. </p>

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