Crystallization suppression of CeO<sub>2</sub> thin films deposited by MOCVD by additional TEOS introduction
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- Furuya Tomonari
- Hosei Univ.
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- Matsumura Takashi
- Hosei Univ.
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- Kikuchi Kensuke
- Hosei Univ.
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- Suzuki Yuta
- Hosei Univ.
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- Suzuki Setsu
- Comet Inc.
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- Ishibashi Keiji
- Comet Inc.
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- Yamamoto Yasuhiro
- Hosei Univ.
Bibliographic Information
- Other Title
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- TEOS 導入によるMOCVD 法CeO<sub>2</sub> 薄膜の結晶化抑制
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2016.1 (0), 1427-1427, 2016-03-03
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390858397087020672
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC